AAAR 31st Annual Conference
October 8-12, 2012
Hyatt Regency Minneapolis
Minneapolis, Minnesota, USA
Abstract View
Combined Influences of Electrophoresis and Thermophoresis on Particle Deposition on a Flat Plate Exposed to a Parallel Airflow
HANDOL LEE, Se-Jin Yook, Hanyang University
Abstract Number: 154 Working Group: Control Technology
Abstract Particle deposition velocity onto a flat surface has been intensively studied through experimental and numerical methods. Effects of electrophoresis and/or thermophoresis on particle deposition velocity have also been examined by assuming a free-standing wafer placed in a vertical airflow. However, few studies have been performed to investigate the combined effects of electrophoresis and thermophoresis on particle deposition velocity onto wafers or photomasks exposed to a parallel airflow. In this study, Statistical Lagrangian Particle Tracking (SLPT) model was employed with the use of FLUENT and DPM. The particle deposition velocities obtained by the SLPT model were in good agreement with the theoretical results predicted by Liu and Ahn (Particle deposition on semiconductor wafers, Aerosol Sci. Technol. 6, 215-224, 1987), when both electrophoresis and thermophoresis were excluded from consideration. In addition, the SLPT model was found to correctly estimate the particle deposition velocity under the combined influences of electrophoresis and thermophoresis, when the particle deposition velocities onto a free-standing wafer in a vertical airflow were compared between the SLPT model prediction and the experimental data of Opiolka et al. (Combined effects of electrophoresis and thermophoresis on particle deposition onto flat surfaces, J. Aerosol Sci. 25, 665-671, 1994). Finally, the particle deposition velocity onto a flat plate in a parallel airflow was investigated by applying electrophoresis and thermophoresis simultaneously.
This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (Grant no. 2010-0003452).
ysjnuri@hanyang.ac.kr