AAAR 31st Annual Conference
October 8-12, 2012
Hyatt Regency Minneapolis
Minneapolis, Minnesota, USA
Abstract View
Fabrication of Micron Sized Porous Silicon Particles from Silicon Kerf Loss
HEE DONG JANG, Dae-Sup Kil, Hankwon Chang, Korea Institute of Geoscience and Mineral Resources
Abstract Number: 46 Working Group: Nanoparticles and Materials Synthesis
Abstract As the semiconductor and photovoltaic industry are going through rapid growth, a large amount of silicon sludge is generated from cutting process of silicon ingot in Korea. Recently, recovery of silicon powder from the sludge has been of great concern because the silicon sludge contains valuable resource such as high purity silicon. In the present study, we investigated the fabrication of micron sized porous silicon particles from silicon kerf loss that mainly composed of silicon carbide and silicon particles. After removing metallic impurities by acid leaching, the silicon particles higher than 99.9% in purity were recovered from the colloidal mixture of silicon and silicon carbide by applying ultrasonic wave and centrifugation. Then, porous silicon particles less than 5 micron in average diameter were prepared from colloidal solution of silicon particles by aerosol spray drying. The porous silicon particles are expected as a raw material of silicon ingot of ultra high purity.