AAAR 35th Annual Conference October 17 - October 21, 2016 Oregon Convention Center Portland, Oregon, USA
Abstract View
Application of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real-time Detection of Contamination Particles in Semiconductor Manufacturing Process
GIBAEK KIM, Kyoungtae Kim, Hyun Ok Maeng, Hae Bum Lee, Kihong Park, Gwangju Institute of Science and Technology
Abstract Number: 425 Working Group: Instrumentation and Methods
Abstract The laser-induced breakdown spectroscopy (LIBS) has been used as a useful tool for rapid detection of elements in various samples (solid, liquid, gas, and aerosols), and can be operated under extreme conditions (high/low pressure and high temperature) (Noda et al. 2002; Thiem et al. 1994; Effenberger Jr and Scott 2010). In this study, the modular aerosol-LIBS was developed to monitor process-induced particles (contamination particles in the semiconductor manufacturing process) in real time. Since the semiconductor manufacturing process can occur at high temperature and low pressure with various chambers and exhaust lines, more flexible and durable LIBS system is required. The modular aerosol-LIBS is developed to allow easy adjustment to the various chambers and exhaust lines in the semiconductor manufacturing process and to operate at extreme temperature and pressure conditions. The modular aerosol-LIBS mainly consists of three modules (laser module, spectrometer module, and flexible and interchangeable chamber module). Several types of chamber modules were designed and each module was interchangeable in the modular LIBS system. The modular LIBS system was evaluated by using various laboratory-generated particles. Various solutions having elements of Co, Cu, Fe, K, Mg, Na, Ni, Si and P that can be detected in the semiconductor manufacturing process were aerosolized into the LIBS system and their emission lines were measured. Further evaluation of the modular LIBS system is being carried out.
This work was supported by Samsung Electronics, Co., Ltd.