AAAR 36th Annual Conference October 16 - October 20, 2017 Raleigh Convention Center Raleigh, North Carolina, USA
Abstract View
Application of Laser Induced Breakdown Spectroscopy for Real Time Detection of Contamination Particles in Industrial Fabrication Process at Various Pressure and Temperature Conditions
KYOUNGTAE KIM, Haebum Lee, Hyunok Maeng, Giback Kim, Jinsung Kim, Kihong Park, Gwangju Institute of Science and Technololgy
Abstract Number: 686 Working Group: Instrumentation and Methods
Abstract Industrial fabrication processes are typically done under extreme conditions (e.g., high temperature and low pressure). Such processes generate particles that could lead to contamination in the fabrication process causing manufacturing defects. Rapid detection of these particles is necessary in order to solve contamination problem. To identify elemental composition of contamination particles in real time, the laser-induced breakdown spectroscopy (LIBS) technique was used for multi-element detection of particles. In this study, a modular type of aerosol-LIBS was developed to be easily adapted into pre-existing tubes and chambers used in on-site fabrication systems. This modular chamber can be easily connected to exhaust lines. In brief, the modular aerosol-LIBS is composed of a pulse laser (1064 nm, 650 mJ/pulse, Surelite II-10, Continuum Inc., USA), an aerosol chamber, and a spectrometer (Aurora, Applied Spectra Inc., USA) with a charge-coupled device (CCD) detector. A window is installed as a view port to allow evaluation of laser beam and light emissions from the micro-plasma inside the modular aerosol-LIBS. Lastly, heating tape and oil vacuum pump were used to control temperature and pressure inside the aerosol chamber. Laboratory-generated calcium chloride (CaCl2) aerosols were used to evaluate the analytical performance of the modular LIBS developed. Results show that Ca peaks in LIBS spectra were not conspicuous dependent on the surrounding temperature (25-200ºC). At low pressure conditions, Ca peaks spectra show mildly affected trends in terms of detection intensity and efficiency. Not only Ca aerosols, but also another laboratory-generated aerosols could be detected.
The research was supported by the Samsung Electronics, Co., Ltd.