10th International Aerosol Conference September 2 - September 7, 2018 America's Center Convention Complex St. Louis, Missouri, USA
Abstract View
An Experiment on Energy Consumption in an Indoor Water Spray Humidification Type Cleanroom with One Fluid Nozzles
Su-Bin Park, Won-Il Song, KYUNG-HOON YOO, Ji-Seok Yang, Deog-Yong Song, Oh-Myoung Kwon, Jungho Hwang, Korea Institute of Industrial Technology
Abstract Number: 1406 Working Group: Workplace Aerosol
Abstract In recent large-scale semiconductor manufacturing cleanrooms, the air conditioning energy consumption required to maintain cleanroom environment represents 40~50 % of the total power consumption in the factory. Therefore, the assessment on energy consumption in the air conditioning system of the cleanroom factory is essential for reducing the air conditioning load for the cleanroom. In particular, the energy consumption required to humidify outdoor air in the winter season is generally known to be enormous. Recently, in order to overcome the high energy consumption nature of a steam generator in a conventional steam humidification type cleanroom, a water spray humidification method with water spray nozzles is often introduced into cleanroom indoors instead of the steam generator in the outdoor air conditioning system. In the present study, a twin cleanroom experiment with an outdoor air flow of 2,300 m3/h was conducted to compare at the same time the electric power consumption structure in a steam humidification type cleanroom and an indoor water spray humidification type cleanroom with one fluid nozzles. Besides, a numerical calculation was carried out to evaluate the annual power consumption of the two types of cleanrooms. It can be concluded from the present study that the indoor water spray humidification type cleanroom is more energy-efficient than the steam humidification type cleanroom. Furthermore it was shown from the numerical results that the indoor water spray humidification type cleanroom reduced 27 % of the annual electric power consumption of the steam humidification type cleanroom.