10th International Aerosol Conference September 2 - September 7, 2018 America's Center Convention Complex St. Louis, Missouri, USA
Abstract View
An Experiment on Energy Consumption in a High-Tech Electronics Industry Cleanroom with Dual Free-Cooling Heat Source
Su-Bin Park, Won-Il Song, KYUNG-HOON YOO, Ji-Seok Yang, Deog-Yong Song, Jungho Hwang, Korea Institute of Industrial Technology
Abstract Number: 1416 Working Group: Workplace Aerosol
Abstract So far, energy conservation issue has been important in electronics industry due to the regulation of global warming gas emission prevention. Besides, in a cleanroom for semiconductor manufacturing, energy saving demand for cleanroom facility is getting stronger because of worldwide price competition of a semiconductor. In such an electronics industry cleanroom with huge internal heat generation, annual continuous cooling is necessary and subsequent energy consumption becomes enormous. Free cooling is very effective for the reduction of the energy consumption in the cleanroom facility in the winter and intermediate seasons. Therefore, in the present article, we describe the present cleanroom facility with respect to the system configuration and operation method of cooling heat source. Finally, experimental energy consumption results with and without free cooling are compared in a way to find out maximizing the energy saving effect of cooling heat source system with dual free cooling operation.