10th International Aerosol Conference September 2 - September 7, 2018 America's Center Convention Complex St. Louis, Missouri, USA
Abstract View
Application of Laser Induced Breakdown Spectroscopy for Real Time Detection of Contamination Particles During Industrial Manufacturing
HAEBUM LEE, Hyunok Maeng, Gibaek Kim, Kyoungtae Kim, Nohhyeon Kwak, Kyungjoo Kim, Kihong Park, Gwangju Institute of Science and Technololgy
Abstract Number: 425 Working Group: Instrumentation
Abstract To assess and control possible defects in industrial manufacturing, rapid detection and identification of contamination particles are required. A stand-off laser induced breakdown spectroscopy (LIBS) system with aerosol detection chamber was developed to detect contamination particles during industrial fabrication process at high temperature and low pressure conditions. An aerosol chamber was constructed to simulate an exhaust vent pipe in semi-conductor manufacturing process at varying temperature and pressure conditions. The stand-off LIBS system detected laboratory-generated CaCl2 particles having various size (200 nm and 300 nm), and also MgCl2, NaCl, and KCl were investigated. Effects of temperature (25℃ to 250℃) and pressure (100 Torr to 760 Torr) on LIBS signal responses were further investigated. With increasing temperature, the emission line and signal-to-noise ratio (SNR) of Ca II (393.366 nm) increased and the limit of detection (LOD) was also enhanced. With reducing pressure, the emission line decreased gradually, however, it was shown that the highest SNR values were appeared at around 630 Torr. In addition, the SNR linearly decreased on the longer air mean free path (MFP). Therefore, an optimized condition of air MFP was an important factor in aerosols detection by LIBS. Although temperature and pressure affected LIBS signal responses, the stand-off LIBS system can still be useful to detect contamination particles in real.