AAAR 34th Annual Conference
October 12 - October 16, 2015
Hyatt Regency
Minneapolis, Minnesota, USA
Abstract View
Development of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real Time Detection of Chemical Elements in Process-induced Particles
Kyoungtae Kim, Hoseong Chae, GIBAEK KIM, Kihong Park, Memory Business, Samsung Electronics Co., LTD, South Korea
Abstract Number: 734 Working Group: Instrumentation and Methods
Abstract The Laser induced breakdown spectroscopy (LIBS) is a useful tool for rapid detection of elemental composition of particles (Park et al. 2009). In the LIBS, a high power pulse laser hit the single particle or collected particle sample to generate microplasma (excited state), and the excited atoms and ions emit light with specific wavelengths during their cooing down to ground state, which can be used to detect elements in the single particle or ensemble sample. In this presentation, the Aerosol-LIBS has been developed to determine elemental composition of process-induced particles (contaminants) in real time.
An aerosol chamber with a shear air focusing system was constructed to continuously introduce particles into the laser focal point, to generate microplasma after particles were hit by a pulse laser, and to detect light emissions from the microplasma. Various laboratory-generated particles (MgCl2, Ca(NO3)24H2O, KCl, and NaCl) were tested for determination of their major elements (Mg, Ca, K, and Na). Optimization of laser, optics, spectrometer, delay time, and particle focusing was also performed. Effects of particle number concentration and size on the hitting efficiency were examined by using particles of known sizes or concentrations. Also, both free-firing and triggering laser systems were applied to significantly improve the hitting efficiency of airborne single particles.