AAAR 35th Annual Conference
October 17 - October 21, 2016
Oregon Convention Center
Portland, Oregon, USA

Abstracts by Hae Bum Lee

Application of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real-time Detection of Contamination Particles in Semiconductor Manufacturing Process. GIBAEK KIM, Kyoungtae Kim, Hyun Ok Maeng, Hae Bum Lee, Kihong Park, Gwangju Institute of Science and Technology